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高速微铣削Al_2O_3工程陶瓷工艺参数试验研究 被引量:8

Experimental Study on Process Parameters of High-speed Micro-milling Al_2O_3 Engineering Ceramics
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摘要 Al2O3工程陶瓷因高强度、高硬度、耐高温等优良特性被广泛应用于航空航天、国防工业、微电子工业等领域。验证了利用金刚石涂层刀具高速精密微细铣削Al2O3工程陶瓷材料的可行性。通过小型高速微铣床对陶瓷工件进行全径铣削微沟槽正交试验,评价指标为加工后得到的表面粗糙度Ra和Rz值,试验因素分别为主轴转速、进给速度和轴向切深,采用极差法分析了各因素对工件表面粗糙度的影响规律,利用多元线性回归的方法对数据进行分析,优化后得到了适合于Al2O3工程陶瓷材料的微铣削加工工艺参数。 Al2 O3 engineering ceramics have high strength, high hardness and high temperature resistance. Therefore, the materials are widely used in aerospace, defense industry, microelectronics industry and many other fields. Orthogonal experiments of high-speed micro-milling Al2 O3 engineering ceramics by machining full-diameter micro-grooves are made, and the feasibility of micro-milling Al2 O3 engineering ceramics with diamond coated tools is verified. In the experiments, evaluation indexes are surface roughness Ra and Rz values. Experimental factors are spindle speed, feed rate and axial depth of cut. Range analysis method is used to analyze the influences of different process parameters on the workpiece surface roughness values. The data is analyzed by multiple linear regression analysis method. Then optimized the process parameters and ob-tained a set of suitable parameters to micro-milling Al2 O3 engineering ceramics.
出处 《组合机床与自动化加工技术》 北大核心 2014年第9期123-126,共4页 Modular Machine Tool & Automatic Manufacturing Technique
基金 国家自然基金项目(51305043) 吉林省重点科技攻关项目(20140204066GX)
关键词 高速微铣削 AL2O3 工程陶瓷 正交试验 表面粗糙度 极差分析 high-speed micro-milling Al2 O3 engineering ceramics orthogonal experiment surface rough-ness range analysis method
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