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Cu(In,Ga)Se_2集成电池吸收层的三步共蒸工艺 被引量:5

STUDY OF THREE-STAGE CO-EVAPORATION PROCESS OF Cu(In,Ga)Se_2 FILMS FOR THE INTEGRATED MODULE APPLICATION
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摘要 利用三步共蒸法工艺在10cm×10cm玻璃衬底上生长出电池吸收层CuIn_(0.7)Ga_(0.3)Se_2薄膜。通过XRF和XRD谱,分析了不同预置层(Precursor)(In_(0.7)Ga_(0.3))_2Se_3生长温度下CuIn_(0.7)Ga_(0.3)Se_2薄膜的结构特性。预置层生长温度分别为300、340和400℃时,所制备的集成组件的转换效率对应为4.23%、5.16%和7.03%(测试条件为:AM1.5,1000W/cm^2)。其组件效率的提高,归因于在预置层生长温度为400℃时所制备的CuIn_(0.7)Ga_(0.3)Se_2薄膜具有良好的结构特性和组份均匀性。 The absorber layer CuIn0.7Ga0.3Se2 films were deposited on a 10cm ×10cm substrate using a three-step coevaporation process. Structural properties of CuIn0.7Ga0.3Se2 films fabricated from (In0.7 Ga0.3 )2Se3 precursors under various growth temperatures as 300, 340 and 400℃ have been investigated by XRD and XRF spectra. For the integrated modules based on the above three absorbers, the conversion efficiency was 4.23%, 5.16% and 7.03%, respectively. The results showed that the absorbers grown from (In0.7 Ga0.3 )2Se3 precursors under the substrate temperature of 400℃ have fine uniformity composition and structural properties.
出处 《太阳能学报》 EI CAS CSCD 北大核心 2006年第9期895-899,共5页 Acta Energiae Solaris Sinica
基金 国家高技术研究发展计划(863)(20041AA513020)
关键词 CuIn0.7Ga0.3Se2薄膜 预置层(In0.7Ga0.3)2Se3 集成组件 CuIn0.7Ga0.3Se2 thin film precursor ( In0.7 Ga0.3 )2 Se3 integrated modules
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参考文献10

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二级参考文献4

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