摘要
洁净室工程始于业主新建厂房计划,在业主确定建厂计划后,会联系具有设计资质的设计商为工厂做整体设计方案,由于洁净室工程在厂房建设中处于重要地位,故在工程设计的过程中设计方会和业主反复沟通,确定洁净厂房的建造方案和技术标准。
In the large-scale construction of Fab in China's Mainland, the semiconductor industry in Taiwan has invested considerable research on the topic of environmental protection and energy consumption, and has begun to be widely applied to actual production. In the planning and construction stage, the continuous development of environmental protection and energy consumption into the system considerations, can help emerging semiconductor chip factory in the production process to enhance the starting point, improve the competitiveness of the future industry in survival.
出处
《集成电路应用》
2018年第1期58-61,共4页
Application of IC
基金
河南省科技型中小企业技术创新资金(10C26214104491)
关键词
集成电路制造
晶圆厂
FAB
超洁净工厂
integrated circuit manufacturing, wafer fab, Fab, energy control
