摘要
要实现微电子洁净厂房的正常运转,离不开与之配套的电力、空调、通风、排风系统、废气处理系统、纯水系统、中温冷冻水系统、压缩空气、特气及大宗气体纯化等外围条件保障系统。在微电子厂房厂务管理中应用计算机集中监控系统(FMCS)可实现对建筑内各系统及成套设备的集中监控管理,通过统一的通信接口和通信协议,连接相关系统和成套设备所提供的盘柜,并将其关键数据集成到FMCS系统中,实现在统一的平台上进行监视与控制、故障报警和历史数据存储。通过此系统,厂务管理人员在中控室即可准确掌握FAB及CUB内各动力设备运行状态,有利于维护系统及生产环节的紧密结合和协调运转。
In order to realize the normal operation of microelectronics clean room, it is indispensable to the supporting peripheral condition guarantee systems such as electric power, air conditioning, ventilation,exhaust system, waste gas treatment system, pure water system, medium temperature chilled water system,compressed air, special gas and bulk gas purification. The application of FMCS in facility management of microelectronic workshop can realize the centralized monitoring and management of various systems and complete sets of equipment in the building. Through unified communication interfaces and communication protocols, the panels and cabinets provided by relevant systems and complete sets of equipment are connected,and their key data are integrated into FMCS system to realize monitoring and control, fault alarm and historical data storage on a unified platform. Through the system, factory management personnel can accurately grasp the operation status of all power equipment in FAB and CUB in the central control room, which is conducive to the close combination and coordinated operation of maintenance system and production links.
作者
姚刚
YAO Gang(The 47th Institute of China Electronics Technology Group Corporation,Shenyang 110032,China)
出处
《微处理机》
2020年第3期62-64,共3页
Microprocessors
