摘要
现有电子洁净厂房为满足洁净度要求普遍存在循环风量冗余问题,具有降低风量节能的潜力,但风量降低过程中气流分布规律和颗粒分布特征的改变不容忽视。对电子洁净厂房常用的风机过滤单元(FFU)送风形式在25%布置率下降低风量的气流和颗粒分布特征进行数值研究,对3种典型人员位置,即人员在FFU下方和人员在盲板下方的情况进行分析。重点考察距离地面1 m高的工作面的颗粒物分布特征。结果表明:当人员处于FFU下方时,随风量降低,对人员热羽流的抑制作用变差,颗粒横向影响范围变大;当人员处于盲板下方时,人员热羽流不受控制,随风量降低,热羽流影响加剧,颗粒横向影响范围变大。人员处于盲板下方时颗粒控制效果差于处于FFU下方的情况。
In order to meet the cleanliness requirements,a redundancy in the recirculated airflow rate commonly exists in the electronic industry clean rooms,and therefore there is a potential to save energy by reducing the airflow rate.However,the variations of characteristics of air distribution and particle distribution during the reduction of airflow rate need to be revealed.The characteristics of air distribution for the typical fan filter unit(FFU)supply cleanroom were investigated numerically with the coverage ratio of 25%.Typical personnel positions,i.e.,below a FFU and not below a FFU,were set up.The results show that in condition that the person is below a FFU,with the decrease of airflow rate the suppression effect on the thermal plume of personnel becomes worse,and the lateral influence range of particles becomes larger.In condition that the person is not below a FFU,the thermal plume of personnel is not under control.As the airflow rate decreases,the influence of thermal plume intensifies,and the influence range of particles becomes larger as well.The particle control effect when the person is not below a FFU is worse than that when the person is below a FFU.
作者
梁书奎
刘禹
邵晓亮
苗淼
陆俊旭
LIANG Shu-kui;LIU Yu;SHAO Xiao-liang;MIAO Miao;LU Jun-xu(School of Civil and Resource Engineering,University of Science and Technology Beijing,Beijing 100083,China)
出处
《建筑节能（中英文）》
CAS
2022年第1期96-101,共6页
Building Energy Efficiency
基金
“十三五”国家重点研发计划资助项目(2018YFC0705201)
国家自然科学基金资助项目(51878043)
中央高校基本科研业务费专项资金资助项目(FRF-TP-20-001A3)。
关键词
电子洁净厂房
风机过滤单元
降低风量
气流组织
洁净度
electronic industry cleanroom
fan filter unit(FFU)
air volume reduction
air distribution
cleanliness
