摘要
为实验研究CO2激光直写加工聚合物微流控芯片,构建了激光直写微加工精密实验台。为实现高速高定位精度,设计中采用直线电动机直接驱动的伺服进给系统。为保证控制系统的实时性,构建了以工控机为上位机,以PMAC控制卡为下位机的双CPU开放式数控系统。并对精密实验台软件结构进行了模块化设计,成功构建出激光直写微加工精密实验台。
In order to experiment the study on CO2 laser direct-writing machining polymer-based micro-fluidic chip, a laser micro-processing precision experimental table was built. A servo feed system directly driven by linear motor was designed to achieve high speed and high positioning accuracy. In order to ensure real-time control system, dual＇CPU open NC system used Industrial Personal Computer （IPC ） as upper-computer and PMAC card as lower computer was constructed. Software structure of the precision experimental table was modularized designed and a laser micro-processing precision experimental table was successfully constructed.
出处
《制造技术与机床》
CSCD
北大核心
2009年第5期70-73,共4页
Manufacturing Technology & Machine Tool
关键词
CO2激光
直写
直线电动机
微流控芯片
精密实验台
CO2 Laser
Direct-writing
Linear Motor
Micro-fluidic Chip
Precision Experimental Table
