摘要
微通道制作是微分析芯片制作中的关键技术之一。就选取材料的原则 ,模板复制中的模具制造技术及微通道直接加工方法做了比较 。
Fabrication of micro channels is a key technique for production of analysis chip. The principles of selecting material, the fabrication of mold used in molding replication and every directly fabricating methods were compared and discussed. Some available methods of microfabrication for production of analysis chip were proposed.
出处
《中国工程科学》
2004年第10期90-94,共5页
Strategic Study of CAE
基金
国家自然科学基金重大研究计划资助项目 ( 90 3 0 70 0 3 )
