摘要
LIGA技术是近几年才开展起来的一门新技术,是微细加工的一种新方法。本文对这一技术,从简单工艺过程到每个具体工序环节都详细、深入地进行了介绍。LIGA技术是由光刻、电铸、塑铸三个环节组成,尤刻以同步辐射深度X光曝光为主。由于同步辐射X光有非常好的平行性、极高的辐射强度、连续的光谱,使这项技术能够制造出高宽比大到100、厚度可达几百微米、结构侧壁平行线偏差在亚微米范围内的微米级三维立体结构。通过电铸、塑铸就可将这一结构转换成金属或塑料的微结构产品。 这项技术在短短几年的发展过程中,已制造出电机、齿轮、发动机、涡轮、联杆、单色器、光纤联接器、电联接器、喷嘴、泵、阀、加速度传感器等微型结构与器件,被认为是将对下一世纪带来重大影响的一门新技术。
The LIGA technique which grows up in recent years is a new method for fabricating microstructure. This is a report about the LIGA process which consists of lithography, galvanofqrming and plastic moulding.Under the process, synchrotron radiation lithography produces a primary template which is filled with a metal by electiodeposition. The metal structure produced is used as a mould insert for fabricating secondary plastic templates which, in mass production, replace the primary template.The primary template of about several hundred microns thickness can be fabricated to have aspect ratio 100 and sub-micron deviation of the pattern width at the two structre ends, due to the good parallelism, high intensity, and broad spectral range of the synchrotron radiation. Now many devices and structures have been finished with this technique, such as electric motor, gear, oil-engine, turbine, mechanical connector, monochrometer, fiber connector, electric connector, nozzle, pump,valve, accelerator sensor.This process will take an important role in futute industry.
出处
《微细加工技术》
EI
1993年第4期1-7,共7页
Microfabrication Technology
关键词
同步辐射爆光
电铸
塑铸
光刻
微器件
synchrotron radiation lithography
galvanoforming
plastic moulding
microfabrication
