摘要
介绍了利用北京正负对撞机(BEPC)同步辐射X射线光刻装置,进行LIGA工艺技术深结构光刻实验研究,详细论述了X射线光刻使用的掩模制备过程及掩模镀金工艺,在国内最早曝光出直径为400μm、厚为27～45μm的三维立体齿轮胶图形。
An experimental research on deep lithography through the LIGA technique by utilizing the synchrotron radiation X-ray lithographic equipment of BEPC, is presented in this paper. The procedures of mask fabrication and processes of mask Au-plating used in X-ray lithography are discussed in detail. For the first time in China, a 400 diameter and 27-45 thick 3-D gear pattern has been exposed.
出处
《仪表技术与传感器》
CSCD
北大核心
1996年第12期16-18,共3页
Instrument Technique and Sensor
基金
国家自然科学基金资助课题
