摘要
利用磁控溅射法在单晶硅上制备了不同层厚比的WS_x/a-C纳米多层膜(调制周期约50 nm)。用扫描电镜、X射线衍射、能谱、X射线光电子谱和Raman光谱对薄膜的形貌、成分和组织结构等进行了表征。采用纳米压痕仪、划痕仪和球盘式摩擦仪测试了薄膜的硬度、结合力和在大气环境下(相对湿度约70%)的摩擦学性能。结果表明:随着层厚比L_(a-C)/L_(WS_x)的增加,多层膜的n_s/n_w比由1.38增大至1.62,并伴随着WS_2尺寸的减小以及薄膜致密度和平整度的提高,a-C层和WS_x层的结构无明显变化;多层膜的磨损率仅为纯WS_x膜的1/3~1/4,摩擦因数由0.26降至0.2,硬度和磨损率均出现峰值,而结合力呈相反变化趋势。层厚比L_(a-C)/L_(WS_x)为1:39的多层膜的摩擦因数为0.26,磨损率为9.8×10^(-14)m^3/Nm,耐磨性最佳。
The WS2/a-C multilayered coatings （A ≈50 nm） were prepared by alternative magnetron sputtering. The impact of the layer thickness-ratio （La-c/Lwsx） on the microstructures and tribological properties of the coatings in air （ RH ≈70% ） was investigated with X-ray diffraction, X-ray photoelectron spectroscopy, energy dispersive spec- troscopy, scanning electron microscopy, Raman spectroscopy, and conventional mechanical probes. The results show that the thickness-ratio strongly affects the mechanical behavior of the coatings. For example, as the thickness-ratio in- creased ,the stoichiometric ratio（ n,/nw） increased from 1.38 to 1.62, accompanied by increasingly improved compact- ness and surface flatness,because the ＂myriapoda-shaped＂ WS2 clusters turned into smaller grains ;the friction-coeffi- cient decreased from 0. 26 to 0. 2;the interracial adhesion decreased;the hardness changed in an increase-decrease manner,peaking at 1：9 and the wear-rate was 1/3 - 1/4 of that of WS2 film. Synthesized at 1：39 ,the coating has fric- tion coefficient of 0. 26,wear-rate of 9. 8 × 10-14 m3/Nm and the strongest wear-resistance.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第6期659-665,共7页
Chinese Journal of Vacuum Science and Technology
基金
浙江省自然科学基金资助项目(LY15E010007)
