摘要
采用电弧离子镀技术,通过改变调制比沉积Cr/TiN纳米多层膜。利用扫描电子显微镜、原子力显微镜、X射线衍射仪、纳米压痕仪研究了调制比对Cr/TiN纳米多层膜表面形貌、微观结构以及力学性能的影响。结果表明,纳米多层膜表面致密、平滑均匀,膜层与基底结合良好,膜层综合力学性能优异,出现明显的纳米效应和界面效应。当调制比为2∶3时,纳米多层膜的硬度达最大值33.22GPa。
Cr/TiN nanoscale multilayers were deposited by arc ion plating with different modulation ratios.The surface morphology,microstructure,hardness and adhesion strength to the substrate of the multilayers were investigated by SEM,AFM,XRD and nano-indenter,respectively.The results show that the Cr/TiN nano-multilayers have compact microstructure with smooth surfaces and comprehensively excellent mechanical properties,indicating nano-interface effects exist in the films.The maximum hardness of 33.22 GPa was achieved as the modulation ratio of 2∶3 was applied.
作者
吴彦超
刘豫瑶
刘洋
高晟元
黄美东
WU Yan-chao;LIU Yu-yao;LIU Yang;GAO Sheng-yuan;HUANG Mei-dong(College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China)
出处
《真空》
CAS
2021年第2期10-14,共5页
Vacuum
基金
天津市大学生创新创业项目(202010065084)。
