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非平衡磁控溅射沉积MoS_2-Ti复合薄膜结构与摩擦磨损性能研究 被引量:26

Study of Structural and Tribological Properties of MoS_2-Ti Composite Coatings Deposited by Unbalanced Magnetron Sputter
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摘要 采用非平衡磁控溅射法制备出不同Ti含量的MoS2-Ti复合薄膜并对其结构进行表征,采用显微硬度仪测量MoS2-Ti复合薄膜的显微硬度,在球-盘摩擦磨损试验机上评价其在大气中的摩擦磨损性能.结果表明:不同Ti含量的MoS2-Ti复合薄膜呈岛状生长模式,断面呈致密细柱状,结晶状态均为无定形态;薄膜的显微硬度随Ti含量增加而升高;MoS2-Ti复合薄膜在大气中的摩擦磨损性能优于MoS2薄膜,掺杂适当Ti可以使MoS2-Ti复合薄膜的摩擦曲线波动减小,耐磨寿命提高,在本试验研究范围内,含30%Ti复合薄膜的耐磨寿命最长,当Ti掺杂量达到50%时MoS2-Ti复合薄膜失去润滑性能. MoS2-Ti composite coatings with different Ti contents (0% - 50%) were deposited by unbalanced magnetron sputtering system, structural and tribological properties of these coatings were studied by SEM, XRD, microhardness tester and ball-on-disc friction and wear tester. Results show that MoS2-Ti Composite coatings grow in islands pattern, their cross-section appear to be dense columnar structure. All composite coatings reveal amorphous structure. The more the Ti content was, the harder the coatings was. Composite coatings exhibited better tribological performance than pure MoS2 coating did, and composite coating has low coefficient of friction between 0.05 - 0. 10, co-deposited Ti in coatings resulted in lower friction fluctuation and enhanced wear resistance. 30% Ti composite coating had the best wear resistance, which is nearly 4 times of pure MoS2 coating. Composite coating's lubricating properties come from MoS2's particular 'sandwiches' structure and low shear strength between layers. When Ti content is over 50% it will destroy MoS2's particular structure and hence has no capability of lubrication.
出处 《摩擦学学报》 EI CAS CSCD 北大核心 2006年第2期183-187,共5页 Tribology
基金 航天支撑技术项目资助(417010802)
关键词 非平衡磁控溅射 MoS2-Ti复合薄膜 结构 摩擦磨损性能 unbalanced magnetron sputter, MoS2-Ti composite coatings, structure, friction and wear behavier
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参考文献13

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