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WS_2/MoS_2/C复合薄膜的磨损性能研究 被引量:2

ANTI-WEAR PROPERTIES OF WS_2/MoS_2/C COMPOSITE FILMS
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摘要 采用磁控溅射法,使用WS2/MoS2复合靶材,通过与乙炔气体反应溅射,制备WS2/MoS2/C复合薄膜,利用X射线衍射对薄膜的成分结构进行分析,采用MFT-4000材料表面性能试验仪在室温大气环境(相对湿度60%)下评价薄膜的摩擦磨损性能,使用AxioCSM700共聚焦显微镜观察WS2/MoS2/C复合薄膜磨损表面磨痕形貌,结果表明,WS2/MoS2/C复合薄膜结构致密,在潮湿大气中抗磨损性能比MoS2磁控溅射薄膜有显著提高,在30min往复摩擦后复合薄膜未发生磨屑脱落。 WS2/MoS2/C composite lubricating film was prepared with C2H2 in working atmosphere by magnetron reaction-sputtering method energy dispersive X-ray detector were used to analyze and using a composite target. X-ray diffraction and the composition and microstructure of the films. The friction behavior was performed on a MFT-4000 material surface properties tester at room temperature in air (RH = 60% ). Axio CSM 700 high-resolution confocal microscope was used to analyze the worn scratches on the composites surface. The composite film had a compact microstructure. As compared with pure MoS2 film at humid atmospheric conditions, the WS2/MoS2/C composite film exhibited better antiwear properties, there were no abrasive dust shedding from the composite films after reciprocate friction for 30 min.
出处 《上海金属》 CAS 2009年第6期28-31,共4页 Shanghai Metals
基金 国家自然科学基金资助项目(50675131)
关键词 WS2/MoS2/C复合薄膜 磁控溅射 磨损性能 WS2/MoS2/C Composite Films, Magnetron Sputtering, Wear Properties
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