摘要
本文综述了ZnO系气敏半导体材料的发展慨况,讨论了元件的结构与气敏效应的关系,评述了解释ZnO系气敏材料性质的敏感机理,探讨了目前存在的问题及今后的发展方向。
The development of ZnO series semiconductor gas-sensing materials are surveyed. The relationship between the element structure and gas-sensing effect is discussed.The sensing mechanism of properties of ZnO series gas-sensing materials is reviewed. Problems and future trend areapproached
出处
《传感器技术》
CSCD
1991年第3期1-5,共5页
Journal of Transducer Technology
