摘要
根据气敏光学特性的要求，用可控气压喷涂和高温处理的新方法，制成ＳｎＯ２膜。膜面平整均匀，晶粒结构细密，缺陷较少，其光学特性比其它方法制成的薄膜好，使用的设备及工艺简单。
By a novel process of high_temperature treatment and controlled pressurized spray coating,SnO 2 films are prepared which possess the gas_sensitive optical properties,have smooth surfaces,fine grain textures and fewer defects,are superior to other films prepared by other processes,and can be prepared by relatively simple equipment and technology.
出处
《华南理工大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
1997年第7期36-40,共5页
Journal of South China University of Technology(Natural Science Edition)
基金
国家自然科学基金
广东省自然科学基金
关键词
气敏
喷涂
热处理
薄膜
光学特性
gas sensitivity
spray
heat treatment
film
optical property
