摘要
本文主要综述了两种类型的半导体电阻型气体传感器,表面控制型气体传感器和体控制型气体传感器,主要讲述了这两类氧传感器的原理,结构特性,制备,应用。综合了国内外研究概况,展望了以后的研究动向。
Two kinds of gas sensors of electric resistance semiconductors were reviewed in this paper： surface-controlled gas sensor and bulk-controlled gas sensor.The working mechanism,structural characteristics,fabrication and application were mainly introduced.The research situation of home and aboard,the research tendency in this field was prospected.
出处
《陶瓷学报》
CAS
北大核心
2011年第4期602-609,共8页
Journal of Ceramics
关键词
氧传感器
电阻型半导体气体传感器
表面控制型
体控制型
oxygen sensor
gas sensors of electric resistance semiconductor
surface-controlled
bulk-controlled
