摘要
通过对半导体气敏元件基体材料和制作工艺的分析研究 ,指出了提高气敏元件检测能力的途径。采用添加技术、超微细化技术、表面修饰技术和控制其工作温度 ,可提高气敏元件的灵敏度和选择性 ;恒流加热法是提高气敏元件热稳定性的主要手段 ;新材料。
The analysis on fundamental material and manufacturing technology for gas sensitive elements of semiconductor provides an effective approach for raising measuring ability of gas sensitive elements.The utilization of additive technology,surface modifying and control of working temperature may raise the sensitivity and selectivity of gas sensitive elements.The introduction of new material and advanced technology will further improve their functions.
出处
《太原理工大学学报》
CAS
2000年第2期113-115,共3页
Journal of Taiyuan University of Technology
基金
煤炭科学基金资助项目! ( 96电 10 611)
