摘要
三维轮廓扫描方法可通过连续扫描透镜表面三维空间形貌,拟合得到其曲率半径值。该方法具有测量精度高、可任意选定测量区域、测量力微弱、对光学表面划伤可忽略等优点。通过实验,研究了三维轮廓扫描法测量透镜曲率半径的精度,并分析了测量区域大小、扫描间距等因素对测量精度的影响。实验结果表明,该方法测量凸、凹球面透镜的曲率半径的相对重复性可达到1×10-6。
Accurate measurement of curvature radius can be realized by three-dimension pro- filometry by scanning and fitting the surface topography of lenses. It takes the advantages of high accuracy, variable scanning area, tiny contact force and neglectable scratch to optical sur- face. Precision of curvature radius measurement by three-dimension profilometry is investiga- ted, as well the influence of scanning area size and scanning intervals on the precision are dis- cussed. Experimental results indicate that the standard deviation of relative repeatability can achieve as high as 1×10^-4in curvature radius measurement in both convex and concave lenses.
出处
《应用光学》
CAS
CSCD
北大核心
2012年第4期761-765,共5页
Journal of Applied Optics
关键词
曲率半径测量
三维轮廓扫描
重复性标准差
最小二乘拟合
curvature radius measurement
three-dimension profilometry
standard deviation ofrepeatability
least square fitting
