摘要
为了精确测量自支撑金属薄膜厚度及其厚度分布,提出了基于白光共焦光谱传感器的金属薄膜厚度测量技术。介绍了该技术的测量原理及系统结构,研究了系统的测量不确定度。利用相向对顶安装的白光共焦传感器组、精密位移平台并结合自制的薄膜厚度校准样品,实现了对厚度为10~100μm的自支撑金属薄膜的厚度及厚度分布的精确测量;通过研究系统的传感器测量不确定度、薄膜厚度校准样品不确定度、上下传感器安装误差及系统重复性测量误差,获得了系统的测量不确定度数据。试验结果表明,该系统的测量不确定度在0.12μm左右,基本满足惯性约束聚变（ICF）靶参数测量所需的稳定性好、测量精度高、非破坏性测量等要求。
To precisely measure the thickness and thickness distribution of a self-supporting metal film,the measurement technology based on a chromatic confocal spectral sensor was established.The measurement principle and system structure were descripted in detail,and the measurement uncertainty was analyzed.The thickness and thickness distribution of the self-supporting metal film with the thickness between 10-100 μm were tested using the sensor group,precise displacement platform and precise calibrated samples.The measurement uncertainty was evaluated based on analysis of sensor accuracy,the uncertainty of calibration sample thickness,the positioning accuracy of two sensors and the system repetition uncertainty.Experimental results indicate that the measurement uncertainty is about 0.12 μm,which satisfies the requirements of Inertial Confinement Fusion（ICF） for target parameter measurement in high stabilization,high precision and non-destruction.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2011年第1期17-22,共6页
Optics and Precision Engineering
基金
国家863高技术研究发展计划资助项目
关键词
白光共焦光谱
金属薄膜
膜厚测量
惯性约束聚变
chromatic confocal spectrum
metal thin film
film thickness measurement
Inertial Confinement Fusion（ICF）
