摘要
针对国内外透镜中心偏高精度测量的迫切需求,研制了一套激光差动共焦透镜中心偏测量系统。该系统从中心偏非接触测量的核心定焦原理入手,结合激光差动共焦定焦技术,解决了清晰度法定焦精度差的难题。在光学测量系统误差分析的基础上,对系统再次优化设计,并利用差动共焦轴向光强响应曲线过零点的位置与被测镜猫眼和共焦点精确对应这一特性,实现了透镜中心偏的高精度测量。通过实验表明,该系统测量精度为0.49%,与传统的清晰度法定焦测量相比,透镜中心偏的测量精度有效提高了6倍。该系统将差动共焦定焦技术有效的应用于透镜中心偏测量中,提高了被测镜猫眼和共焦位置的定焦能力,实现了高精度测量系统的设计,在光学测试和透镜加工及装配领域具有广阔的应用前景。
To meet the urgent needs of high-precision measurement of centering error at home and abroad,a laser differential confocal centering error of the lenses measurement system is developed.The system starts from the core fixed focus principle of center-offset noncontact measurement,and combines the laser differential confocal fixed focus technology to solve the problem of poor resolution of the legal focus accuracy.On the basis of the error analysis of the optical measurement system,the system is optimized again and the position precisely corresponds to the cat′s eye and the confocal point of the lens under test,which realizes the high-precision measurement of the centering error of lenses.Compared with the traditional sharpness legal focus measurement,experiments show that the measurement accuracy of the system is 0.49%,and the measurement accuracy of the centering error of lens is effectively improved by 6 times.The system effectively applies the differential confocal fixed focus technology to the centering error of lenses measurement,improves the fixation ability of the catenary and confocal position of the measured mirror,and realizes the design of a high precision measurement system,which has a broad application prospect in the field of optical testing and lens processing and assembly.
作者
章广威
崔健
邱丽荣
王允
赵维谦
Zhang Guangwei;Cui Jian;Qiu Lirong;Wang Yun;Zhao Weiqian(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2023年第2期24-31,共8页
Chinese Journal of Scientific Instrument
基金
国家重点研发计划(2017YFA0701203)
基础加强计划技术领域基金项目(2019-JCJQ-JJ-280)资助
关键词
差动共焦
透镜中心偏
定焦技术
高精度
differential confocal
centering error of lenses
fixed focus technology
high-precision
