摘要
为了满足高精度透镜加工工艺的要求,设计了一套基于全场干涉测量方法的透镜三维轮廓测量系统。已标定的透镜三维轮廓测量系统利用分布式反馈激光二极管对透镜进行波数扫描,对CCD相机采集到的干涉图像依次进行随机采样傅里叶变换和解卷绕算法,最终通过计算得出透镜的三维轮廓数据。实验结果表明:该系统横向和纵向的分辨率均为0.011 3mm/pixels,深度方向的测量均方根误差为±19.8nm。系统结构简单、稳定性高,对透镜没有任何接触,不会对透镜表面造成损伤,适用于透镜的高精度轮廓测量。
A method for measuring the three-dimensional （3D） profile of lens by full-field interferometry was proposed to meet the requirement of high accuracy processing technology. A distribution feedback（DFB）diode laser of calibrated 3D profile measurement system was used to perform the wavenumber-scanning interferometric measurement for the lens. The interference image random sampling Fourier transform （RSFT） and unwrapping algorithm were used to process interference image acquired by CCD, and finally the 3D lens profile was obtained after had been calculated. Experimental results indicate that the horizontal and vertical resolution of the system are both 0. 011 3 mm/ pixels, and the root mean square error of measurement in the depth direction is ±19.8 nm. The system is characterized by simple structure, high stability, no contact with the lens, no damage to the lens surface, and high-precision contour measurement suitable for the lens.
出处
《应用光学》
CAS
CSCD
北大核心
2018年第2期220-224,共5页
Journal of Applied Optics
基金
广州市科技计划项目资助(201604016135)
关键词
光学计量与检测
透镜三维轮廓
激光波数扫描
全场干涉测量
optical measurement and testing
three-dimensional profile of lens
laser wavenumber scanning
full-field interferometry
