摘要
为解决光学干涉测量中相位变化过快以及噪声等问题对于相位数值重建的影响,提出一种基于二阶质量权的四向剪切最小二乘相位解包裹算法。该算法将剪切干涉技术和用于标识数据好坏的质量权值引入四向最小二乘相位解包裹算法,不仅可以有效改善因相位变换过快导致的欠采样问题,而且提高了算法的稳定性。根据离散梯度对误差传递的影响,对基于二阶质量权的四向剪切最小二乘相位解包裹算法进一步优化。仿真结果表明,基于二阶质量权的四向剪切最小二乘相位解包裹优化算法得到的相位图更接近于理想值,其平均误差仅为基于横向剪切的四向最小二乘算法平均误差的50%。将该算法应用到数字全息三维形貌再现技术,纵向可达到优于微米量级测量精度,测得台阶样片纵向误差为0.012μm。
In order to reduce the impacts of the phase that changes too fast and the noise on the recon- struction of the phase in the optical interferometry,a four-direction least-square phase unwrapping algo- rithm based on shearing interferometry and the second derivative of quality weight is proposed. The algo- rithm introduces the quality weight that can check the data quality and the lateral shearing interferome- try,and applies them to the four direction least-square phase unwrapping algorithm. The algorithm can not only improve the under-sampling caused by the phase transition,but also improve the stability of the algorithm. Then, according to the relationship between discrete gradient and phase error, an improved four-direction least-square phase unwrapping algorithm based on shearing interferometry and the second derivative of quality weight is proposed. By comparing the simulation results of the improved algorithm and the four-direction least-square phase unwrapping algorithm based on shearing interferometry,it can be clearly found that the former is closer to the ideal value. Besides, the average error of the former is only half of that of the latter. The algorithm is applied to digital holographic 3D surface reconstruction technology,which can achieve better accuracy than micron level measurement. Through this method,the depth error of the step sample is 0. 012 μm.
作者
李芹
刘维
王道档
孔明
郭天太
赵军
陈正霞
LI Qin;LIU Wei;WANG Dao-dang;KONG Ming;GUO Tian-tai;ZHAO Jun;CHEN Zheng- xia(College of Metrology and Measurement Engineering, China J iliang University, Hangzhou 310018,China;Sec- tion of Design Technology, Changzhou Hydraulic Complete Equipment Factory Co. , Ltd. , Changzhou 213164, China)
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2018年第6期618-626,共9页
Journal of Optoelectronics·Laser
基金
国家自然科学基金(51375467)
浙江省自然科学基金(LY17E050014)
国家质量监督检验检疫总局公益性行业科研专项(201310116)
国家质量监督检验检疫总局科技计划(2017QK033)资助项目
关键词
相位解包裹
四向最小二乘
质量权值
欠采样
phase unwrapping
four-direction least-square
quality weight
under sampling
