摘要
阐述了对高纯气体产品质量监测的重要性并分析了影响高纯气体质量监测准确性的各种因素(掌握正确的取样技术;配备高气密性、不产生交叉污染的配气和测量装置;选择高灵敏度的监测方法;建立完善的质量保证体系)。
This paper describes the importance of product quality monitoriny of high purity gas and analyses various factor which effect accuracy of quality monitoring of high purity gas（mastering proper sampling craft;providing equipment of preparing mixed gases and measurementing that have high airtight and don′t happen cross pollution;selecting monitoring method that have high sensitivety;establishing perfect quality ensurance system）
出处
《低温与特气》
CAS
2010年第4期39-42,共4页
Low Temperature and Specialty Gases
关键词
高纯气体
杂质分析
取样技术
测量装置
质量保证体系
high purity gas
impurity analyses
sampling technique
measurement device
quality ensurance system
