摘要
介绍了我国含氟电子气体发展现状以及技术研究进展。国内含氟电子气体产品在下游应用企业中的接受度较低,与国外发展存在明显差距。研究和开发含氟电子气体的关键技术主要包括合成、纯化、分析和包装等技术。
Development status and technology progress of fluorinated electronic gases in China are introduced in this article. There is a significant gap between domestic and foreign development of fluorinated electronic gases,and the acceptance of domestic products in downstream application enterprise is lower. The key technology of research and development of fluorinated electronic gases mainly includes synthesis,purification,analysis and packaging technology,etc.
作者
徐娇
张建君
史婉君
潘晋亨
鬲春利
XU Jiao;ZHANG Jianjun;SHI Wanjun;PAN Jinheng;GE Chunli(Zhejiang Research Institute of Chemical Industry Co.,Ltd.,Hangzhou 310023,China)
出处
《低温与特气》
CAS
2018年第3期1-5,共5页
Low Temperature and Specialty Gases
关键词
含氟电子气体
合成
纯化
分析
包装
fluorinated electronic gases
synthesis
purification
analysis
packing
