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高纯气体中微量氧的测定方法 被引量:9

Determination of Trace Oxygen in High Purity Gases
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摘要 介绍了高纯气体中微量氧的两种测定方法:气相色谱法和微量氧分析仪。气相色谱法主要用到的检测器为:热传导检测器、氩离子化检测器和氦离子化检测器。气相色谱法测定高纯气中的微量氧精度较高、性能稳定、数据可靠。而微量氧分析仪一般应用两种原理:电化学方法和浓差电池法。微量氧分析仪测定高纯气中微量氧实时在线、成本低、小型化、自动化、智能化。总结了两种方法测定高纯气体中微量氧的特点,包括检测方法的原理和主要技术指标。 Two methods of high purity oxygen gas trace were introduced, which are gas chromatography and trace oxygen analyzer. The chromatography detector mainly used were thermal conductivity detector, argon ionization detector and helium ionization detector. Using gas chromatography to detect high purity has high oxygen gas trace precision, stable performance and reliable data. The trace oxygen analyzer general was according to two principles, which were electrochemical method and concentration cell method. Using trace oxygen analyzer to detect high purity oxygen gas trace was real-time online, low cost, miniaturization, automation and intelligent. The characteristics of two methods of trace gases of high purity oxygen were summarized in this paper, including the principles and main technical indicators.
出处 《化学与粘合》 CAS 2016年第4期303-305,共3页 Chemistry and Adhesion
关键词 高纯气体 微量氧 色谱法 微量氧分析仪 High-purity gases trace oxygen chromatography trace oxygen analyzer
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