摘要
使用磁控溅射法在生物医用NiTi合金基体表面制备了Ti/TiN、Ti/DLC以及Ti/CNx梯度薄膜,利用扫描电镜研究了薄膜的截面形貌,并使用划痕仪及摩擦磨损仪研究比较了薄膜的力学性能。结果表明:薄膜均表面平整,与基底结合紧密。Ti/CNx薄膜与NiTi合金基底的结合力大于Ti/DLC薄膜,略低于Ti/TiN薄膜。3种梯度薄膜均能有效改善NiTi合金的耐磨损性能,其中,Ti/CNx薄膜拥有最低的摩擦系数和最完整的磨损表面,耐磨性最好。
Ti/TiN,Ti/DLC and Ti/CNx gradient films were deposited on biomedical NiTi alloy substrates by reactive DC magnetron sputtering. Section morphology of the films was investigated by scanning electron microscope, and a comparative research of the mechanical properties of the films was carried out using Scratch Tester and Friction and Wear Tester. The results showed that the films were uniform, compact and fast bound onto the substrate. The adhesion of the Ti/CNx was higher than Ti/DLC, but slightly lower than Ti/DLC film. The wear resistance property of the NiTi alloy was effectively improved by coating three gradient films. The wear surface of the Ti/CNx film was most integrated and the friction coefficient was minimum, which showed the best wear resistance property.
出处
《化工时刊》
CAS
2008年第6期11-14,共4页
Chemical Industry Times
关键词
氮化碳薄膜
结合力
耐磨性
carbon nitride film adhesion wear resistance property
