摘要
以高纯石墨作靶材、N2/Ar为工作气体,采用非平衡磁控溅射技术在高速钢上制备了光滑、致密、均匀的掺氮DLC膜。用XPS、Raman光谱仪表征了DLC膜的结构,并在球-盘摩擦试验机上研究了其摩擦特性。结果表明:工作气体中的N2比例对DLC膜结构及其摩擦特性影响较大,随着N2比例的增加薄膜中sp3的比例减少,而sp2和碳氮键的比例增加;随着N2比例的增加,薄膜摩擦因数先减后增,这与薄膜中sp3比例下降和sp2比例增加而导致薄膜的硬度以及内应力变化有关。就本试验而言,工作气体中N2比例不应高于20%。
Diamond-like carbon （DLC） films doped with nitrogen atoms were deposited on high speed steel at room temperature prepared by unbalanced magnetron sputtering method with NJAr as working gases and high purity graphite as a target. Surface of films are smooth, compact and uniform. The structure and component of films were characterized using Raman and X-ray photoelectron spectroscopy, respectively. Friction coefficients of films were tested with ball-on-disk friction testing machine. The results show that the sp3 bond relative content decreases, however, carbon nitrogen and sp2 bond relative content increase in the films with increasing N2 cubic content in the working gas. Friction coefficients of the films decrease firstly, but increase subsequent with increasing N2 cubic content in the working gas. In order to achieve anti-frictional DLC films,the relative content of N2 in the working gas is as low as 20% in the present test.
出处
《润滑与密封》
CAS
CSCD
北大核心
2007年第10期25-28,共4页
Lubrication Engineering
基金
国家自然科学基金资助项目(50575173)
陕西省薄膜技术与光学检测重点实验室开放基金项目(ZSKJ200501)
关键词
类金刚石膜
非平衡磁控溅射
摩擦特性
diamond-like carbon films
unbalance magnetron sputtering
friction behaviors
