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物理气相沉积TiN薄膜疲劳磨损形貌的AFM观测 被引量:5

AFM Observation of Fatigue Surface Images of TiN Thin Films by Physical Vapor Deposition
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摘要 采用物理气相沉积工艺在高速钢表面沉积TiN薄膜,研究了TiN薄膜的疲劳磨损过程。采用原子力显微镜(AFM)观测分析了表面疲劳点蚀的形貌特征。试验结果表明:较厚TiN薄膜具有较低的疲劳磨损寿命,而较薄的TiN膜层具有较高的疲劳磨损寿命。在试验的初始阶段,磨损轨迹上都出现大量显微凹坑,AFM观测分析可知显微凹坑起源于薄膜表面,呈菱形状。随试验的进行,较薄的TiN薄膜出现典型的疲劳麻坑,而较厚的TiN薄膜在薄膜与基体的界面处形成疲劳裂纹,并出现严重的剥层和断裂。 Fatigue wear performance of TiN hard coating on the surface of high speed steel (HSS) by ion sputtering deposition process was investigated using atomic force microscope. The experimental results show that thinner TiN hard coating is found to provide the better fatigue wear performance. There are a large number of micro-pits in the rolling track in the initial stage of fatigue wear. For thinner TiN coating, micro-pits become larger and some of micro-pits connect with each other,while fatigue micro-cracks generate in the interface between the TiN film and substrate, and thicker TiN coating undergoes serious spalling and fracture.
出处 《润滑与密封》 EI CAS CSCD 北大核心 2006年第7期68-70,共3页 Lubrication Engineering
关键词 滚动疲劳试验 TIN薄膜 疲劳磨损 rolling fatigue testing TiN coating fatigue wear
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