摘要
随着微探测器的广泛应用,M E M S 技术因其微小、智能、可执行、可集成、工艺兼容性好、成本低等特点,被越来越多地应用于微探测器的制造工艺中,为该领域的研究提供了新途径。本文简要介绍了 MEMS 技术的工艺及其主要特点,并对 MEMS 技术在非制冷红外探测器研制方面的应用作了比较详细的阐述。
With wide applications of micro-detectors, MEMS technology is more and more used in the manufacture of micro-detectors. It provides micro-detectors with miniature, smart, actuating, integrated, low cost and technology compatible characteristics, and has shown to be an absorbing way for detectors research field. The MEMS technology and its main characteristics are briefly described, and then its application in uncooled infrared detector is introduced in details.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第10期27-30,34,共5页
Semiconductor Technology
基金
国家自然科学基金资助项目(69976004
60276033
北京市自然科学基金资助项目(4982005)
北京市教委科技发展项目(KM200310005009)
