摘要
国家自然科学基金委员会重大研究计划"纳米制造的基础研究"历时8年于2018年完成结束评估。重大研究计划实施过程中,在基础理论方法、关键技术、核心仪器装备、典型工程示范应用等几个层面取得了系列集成成果。本文概述了该计划在亚纳米材料去除机理、纳米尺度结构成形、跨尺度批量化制造的原理与方法、系列纳米制造装备国产化等关键技术上所取得的一系列具有重大国际影响的突破性进展。文中展望了纳米制造研究的发展态势,提出了未来关注的重点学术方向。
NSFC major research plan of'Fundamental Research on Nanomanufacturing'has been successfully executed for 8 years and completed in 2018.A series of integrated achievements have been attained during the implementation of this major research plan in terms of basic theoretical methods,key technologies,core equipment,typical engineering demonstration,etc.This review summarizes the research progress of this major research plan and presents a series of representative breakthroughs,which mainly focus on materials removal at sub-nano level,nanostructure forming,mutli-scale mass production and localization of high-end nanomanufacturing equipments.This review also prospects the developments trends of nanomanufacturing and put forward several key academic fields to be paid more attention in the future.
作者
王国彪
赖一楠
卢秉恒
雒建斌
黎明
刘红忠
刘磊
叶鑫
Wang Guobiao;Lai Yinan;Lu Bingheng;Luo Jianbin;Li Ming;Liu Lei;Ye Xin(Department of Engineering and Materials Science,National Natural Science Foundation of China,Beijing,100085;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an,710049;Department of Precision Instrument,Tsinghua University,Beijing,100084;School of Mechanical Engineering,Southeast University,Nanjing,211189;School of Mechanical Engieering,Beijing Institute of Technology,100081)
出处
《中国科学基金》
CSCD
北大核心
2019年第3期261-274,共14页
Bulletin of National Natural Science Foundation of China
关键词
纳米制造
纳米精度
纳米尺度
跨尺度
纳米制造装备
基金委重大研究计划
nanomanufacturing
nano-precision manufacturing
nanoscale manufacturing
cross-scale manufacturing
high-end manufacturing equipment
major research plan of NSFC
