摘要
结合非晶金刚石离子镀膜机的工艺特点和要求 ,本文介绍了一种成功应用的分布式控制系统的设计 ,重点讨论了控制系统的硬件配置、软件设计。
Adapting to technical property and requirement of amorphous diamond (AD) ion plating equipment, a kind of design of distributed control system applied successfully is introduced. The hardware configuration, software design, communication services program and several control arithmetic of software program are discussed in detail.
出处
《真空》
CAS
北大核心
2003年第5期19-23,共5页
Vacuum
