摘要
结合非晶金刚石离子镀膜机的工艺特点和要求,介绍了一种成功应用的分布式控制系统的设计,重点讨论了控制系统的硬件配置、软件设计、通信服务程序以及软件编程中的几个控制算法。
Based on the technical properties and requirements of amorphous diamond(AD) ion plating equipment , a design method of a distributed control system which has been successfully put into application is introduced in this paper. The hardware configuration, software design, communication services program and several control arithmetic of the software program are discussed in detail.
出处
《真空电子技术》
2004年第1期20-24,共5页
Vacuum Electronics
