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准分子激光加工表面轮廓的分形插值模拟及d值的影响

Fractal Interpolation Simulation of Surface Profile Processed by Excimer Laser and d Worth's Influence
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摘要 准分子激光加工的表面的分形特征的研究未见有报道,本文首先分析了准分子激光加工表面可以具有分形特征,说明可以用分形理论来对它进行分形分析.进而利用IFS理论模拟了某准分子激光加工表面轮廓,并给出了模拟的算法流程图,结果表明:在适当的d值下,模拟结果与实测轮廓很接近.最后探讨了不同的d值对模拟结果的重大影响及d值的确定. It hasn't been reported that surface fractal character is researched by excimer laser processed.Ihis paper analyzes that the surface processed by excimer laser can have fractal characteristic and it can be fractal analysed by fractal theory at first.Then I make use of IFS theories to imitate the surface profile which is processed by excimer laser,and bring forward the imitation's calculated way flow chart.It resulted out that the emulation result is near to real profile very much under appropriate d worth.At last I discuss that different d worth's great influence to imitated result and how to confirm the d worth.
作者 陈志新 刘莹
出处 《南昌大学学报(工科版)》 CAS 2002年第4期31-34,41,共5页 Journal of Nanchang University(Engineering & Technology)
基金 江西省教育厅科技项目资助
关键词 表面轮廓 模拟 IFS 分形插值 准分子激光加工 迭代函数系统 IFS fractal interpolation simulation excimer laser process
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