摘要
介绍了准分子激光微细加工技术的特点、加工机理以及加工系统。探讨了准分子激光用于表面微观形貌的修饰技术,采用准分子激光微细加工技术对A l2O3陶瓷材料试件表面构建表面微观形貌,达到改善材料表面微摩擦性能,最终为实现微机械中微摩擦性能的控制提供了有利的手段。
The paper introduced the characteristics, mechanism and systems of excimer laser micro processing technique,and discussed that excimcr laser is used to surface micro texturing. The micro friction performances on the surfaces of Al2O3 ceramic becomes better by Excimer laser processed in order to afford advantageous means to control micro topographic performance on micro machine.
出处
《江西冶金》
2006年第5期6-8,共3页
Jiangxi Metallurgy
基金
江西省教育厅资助项目(赣教技字[2006]57号)
南昌大学校基金资助项目(Z03303)
关键词
准分子激光
表面修饰
微观形貌
excimer laser
surface texturing
micro topography
