摘要
对近年国内外MEMS摩擦学研究的新进展作了综述,介绍了MEMS系统的纳米摩擦学特性,讨论了包括环境条件、材料处理、表面改性、固体薄膜润滑、分子超薄膜润滑等在解决MEMS摩擦和润滑问题上的研究状况,并提出了当前相关研究中所遇到的问题,及今后MEMS摩擦学发展的方向。
The latest development of researches on nanotribology of micro-electromechanical systems (MEMS) was reviewed,including the features of friction and wear,the application of surface modification,and soild film lubrication as well as the ultra-thin film lubrication for MEMS.Some questions and suggestions about the further study on the nanotribology of MEMS were proposed.
出处
《润滑与密封》
CAS
CSCD
北大核心
2005年第4期180-186,204,共8页
Lubrication Engineering
关键词
纳米摩擦学
微机电系统(MEMS)
固体薄膜润滑
超薄膜润滑
micro/nanotribology
microelectromechanical systems (MEMS)
soild film lubrication
ultra-thin film lubrication
