摘要
为了实现真空测量仪器的小型化,开展了MEMS电容薄膜真空计的研制。首先研制了差压式结构,以验证感压薄膜的性能,之后研制了绝压式结构,通过不断优化迭代,最后完成绝压式MEMS电容薄膜真空计样机研制。性能测试结果表明,真空计的测量范围为0.2~103 Pa,分辨率0.1 Pa,全量程准确度0.1%FS。对研制过程中解决的关键技术,如“平整大宽厚比感压薄膜制备”“非蒸散型吸气剂薄膜制备”“传感器封装”等进行了介绍,并对未来工作进行了展望。
Recent years,we dedicated to the development of capacitance diaphragm gauge based on MEMS technology for the miniaturization of vacuum measuring instruments.Firstly,a differential pressure structure was made to verify the performance of the pressure-sensing diaphragm;then the absolute pressure structure was developed;finally,a prototype was constructed.At present,the development and performance test of the prototype have been completed.The experimental results show that the measurement range is 0.2 to 103 Pa,the resolution is 0.1 Pa,and the full scale accuracy is 0.1%.In the development process,we divided all the research work into several key technologies,including“preparation of flat pressure sensing diaphragm with large width-thickness ratio”“non evaporating getter film”and“sensor packaging”.This paper introduced the key technologies encountered and solved in the development process,and made expectations for future work.
作者
李刚
韩晓东
周超
李得天
LI Gang;HAN Xiaodong;ZHOU Chao;LI Detian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Aerospace Engineering,Xiamen University,Xiamen 361000,Fujian,China)
出处
《真空与低温》
2022年第4期403-408,共6页
Vacuum and Cryogenics
基金
国家自然科学基金重大科研仪器研制项目(61627805)。
