摘要
真空计量器具被广泛应用于各科学实验领域,种类繁多,样式各异。真空计的微型化是其主要发展趋势。概述了真空计的发展历程,重点对近年来真空计的最新发展作了梳理,并提出了某些特殊环境下真空度测量方法的构想。
The vacuum gauge has various styles,and is widely used in many scientific field as well as industries.A notable trendency for the development of modern gauges is their miniaturization.In this paper,the history,especially its recent development of vacuum gauge is reviewed,and some vacuum measurement under special circumstances is discussed.
出处
《真空与低温》
2011年第1期53-57,62,共6页
Vacuum and Cryogenics
关键词
真空计
真空测量
微机电系统
电容薄膜真空计
vacuum gauge
vacuum measurement
MEMS
capacitance diaphragm gauge（CDG）
