摘要
研究了微热板的传热特性，从理论上分析了恒温模式下工作温度和结构尺寸对微热板电阻真空传感器工作特性的影响。设计了一种边长为93μm、四臂支撑的方形微热板结构的电阻真空传感器，支撑桥长65μm、宽21μm，微热板与衬底之间的气隙高度为0．5μm；采用表面微机械加工技术成功实现了该传感器的加工。用恒温电路进行测试的结果显示，该微热板真空传感器气压测量范围约2～10^5Pa，且响应特性与理论计算结果相符。
To study the characteristics of Micro-hotplate（MHP）based vaccum sensor at constant temperature working mode, the influences of working temperature and dimensions on the working characteristics of MHP-based thermal vacuum sensor at constant temperature was analyzed based on the thermal analysis of MHP. An MHP-based thermal vacuum sensor was designed in the supporting beams of 65 μm long and 21 μm wide, and the gas gap below micro-hotplate of 0.5 μm. The micro sensor was fabricated successfully with surface micromachining technology. The testing results show that the fabricated vacuum sensor is sensitive in pressure range of 2～10^5 Pa and the sensor response characteristics are consistent with the theoretical calculated results.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2008年第7期1253-1257,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.90207003No.90607003)
关键词
微热板
电阻真空传感器
恒温
Micro-hotplate（MHP）
thermal vacuum sensor
constant temperature
