摘要
针对微热板式微气压传感器的动、静态性能测试，建立了一套保持真空度稳定的控制系统。参考MATLAB的仿真结果，分别采用模糊控制与模糊PID控制算法设计出控制器，对传感器测试系统的真空度进行了实时控制研究，探讨并分析了真空度动态平衡的控制问题。结果显示，调整系统控制量的模糊PID控制稳态误差小、鲁棒性比较好，可以有效地对测试环境进行真空度调节和设置，能够解决传感器所需气压测试环境10-1000Pa的实时气压控制问题。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree. Through the simulation results based on MATLAB, Fuzzy control and Fuzzy PID control algorithm were applied respectively to design the controller. The real-time control study on the vacuum degree of micro gas pressure sensor testing system was carried out, and the control problems of vacuum degree dynamic equilibrium were discussed and analyzed. The results show that fuzzy PID control based on adjusting system control quantity has less steady-state errors and better robust, which can regulate and set the vacuum degree of testing environment effectively and solve real-time gas pressure control of the 10- 1000Pa vacuum testing environment for sensor.
出处
《微纳电子技术》
CAS
2007年第7期457-460,共4页
Micronanoelectronic Technology
基金
国家自然科学基金重点项目(90607003)
关键词
微气压传感器
真空度平衡
实时控制
模糊PID控制
micro gas pressure sensor
vacuum degree equilibrium
real-time control
fuzzy PID control
