摘要
设计了硅基MEMS粗真空传感器及其工艺流程,分析了MEMS粗真空传感器的工作原理和过程,制作了MEMS粗真空传感器,并对其真空敏感特性和温度交叉敏感特性进行了实验研究。研究结果表明:采用恒压源供电时,制作的MEMS真空传感器灵敏度高达0.55μV/Pa,同时,具有很好的线性度和重复性。
Silicon based MEMS vacuum sensor at coarse vacuum range and technological process are designed,and its working principle and process are anayzed.The vacuum sensor is manufactured,and its sensitivity characteristics are studied in experiment.Experiment results show the very high sensitive characeristic can be gotten by MEMS vacuum sensor,its sensitivity is nearly 0.55 μV/Pa with good linearity and repetitiveness.
出处
《传感器技术》
CSCD
北大核心
2005年第1期87-88,共2页
Journal of Transducer Technology
关键词
微电子机械系统
粗真空
真空传感器
MEMS(micro-electro-mechanical systems)
coarse vacuum
vacuum sensor
