摘要
在某大型航天器的调试试验中,需使用电容薄膜规(以下简称薄膜规)进行密封舱内真空度测量,结果发现薄膜规测量数据出现了较大的偏差。本文即对这一问题进行原因分析,提出在真空环境下,薄膜本底偏移量是产生偏差的最重要原因,并有针对性地采取解决措施。
The capacitance film vacuum gauge （hereinafter referred to as film gauge） was used to measure vacuum in a debugging test about large spacecraft experiment. At last we found that the measurement datas appeared large deviation. Through analysis, it was found that the film background offset mainly lead to deviation in vacuum, and the corresponding solutions were adopted,
出处
《真空》
CAS
2013年第4期58-60,共3页
Vacuum
关键词
薄膜规
本底偏移量
真空
偏差
film gauge
background offset
vacuum
deviation
