摘要
利用N2、He、Ar三种气体对三只电容薄膜规(CDG)在10-2Pa～102Pa的热流逸效应进行了研究,对实验数据进行拟合,得到每种气体在热流逸效应产生区间CDG示值压强的拟合公式,并用实验验证了公式的准确性。对实验数据和拟合公式的分析表明,CDG的校准因子在较高压强(>102Pa)下,趋近于一个与气体种类和校准室温度无关的极限值;在较低压强(<10-2Pa)下,趋近于一个与气体种类无关,与校准室温度有关的极限值;在这两者之间的压强范围,校准因子与气体的种类和校准室温度呈复杂的函数关系。
The thermal transpiration of three capacitance diaphragm gauges （CDG） was experimentally studied for gases of N2, He and Ar in the pressure range of 10- 2Pa to 102 Pa. The correction equation for each gas species was derived by fitting the pressures measured with a CDG in the pressure range in which strong thermal transpiration can be observed. The correction equations were double checked by measurement with the conventional gauges. The results show that the calibration factor mainly depends on the pressures of interest. For example, at high pressure （ 〉 10^2 Pa） the calibration factor of CDG maximizes;at low pressure （ 〈 10^-2Pa） it minimizes,and it is independent of gas species and temperature in these two cases. However, in the pressure range of 10^-2pa to 10^2 Pa, the calibration factor is a complicated function of gas species and temperatures.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第1期16-20,共5页
Chinese Journal of Vacuum Science and Technology
关键词
电容薄膜规
热流逸效应
校准因子
温度
Capacitance diaphragm gauges（CDG）, Thermal transpiration effect, Calibration factor, Temperature
