摘要
微机电系统(Micro Electro-Mechanical Systems)简称MEMS,也被叫做微机械、微系统。电子机械系统,具有高响度速度、大行程、高精准等特征,被广泛运用到各个领域中,发挥着至关重要的作用。直线电机不需要借助传动装置进行运动转化,并且具有动子速度大、响应速度快,定位精准度高等优势,可以进一步满足微机电系统对微驱动器的要求。基于此,文章深入研究了微电机系统中永磁直线电机的结构,并提出了优化策略。
Micro Electro-Mechanical Systems is abbreviated as MEMS,also known as micro-machines and micro-systems.MEMS has the characteristics of high loudness speed,long stroke,high precision,etc.,which are widely used in various fields and play a vital role.The linear motor does not need to use a transmission device for motion conversion,and has the advantages of high mover speed,fast response speed,and high positioning accuracy,which can further meet the requirements of micro-electromechanical systems for microdrives.Based on this,the article deeply studied the structure of the permanent magnet linear motor in the micro-motor system,and proposed an optimization strategy.
作者
解宗梁
许京娟
Xie Zongliang;Xu Jingjuan(Shandong BTMEAC Co.LTD.,Yantai 265718,Shandong,China)
出处
《橡塑技术与装备》
CAS
2021年第23期55-58,共4页
China Rubber/Plastics Technology and Equipment
关键词
微机电系统
永磁直线电机
结构设计
优化
MEMS
permanent magnet linear motor
structure design
optimization
