摘要
通过气相化学沉积(CVD)工艺生长的石墨烯薄膜具有缺陷程度低且可实现层数可控等优良特点。基于硫酸铜酸性镀铜工艺,在不同的电流密度条件下采用电沉积技术制备超薄铜箔,并用作CVD工艺的基体,合成高品质少层石墨烯。采用X线衍射仪(XRD)、扫描电子显微镜(SEM)及多测试位置拉曼光谱技术对不同电沉积铜箔结构、表面形貌及其上生长的石墨烯进行分析。结果表明:电沉积铜箔的结构具有很强的择优晶面取向性,且其取向晶面与沉积的电流密度有关,在高温、H_(2)气氛退火处理后拥有比商业冷轧铜箔更有利于石墨烯生长的平整表面及连续滑移台阶;通过调控铜箔基体电沉积过程的电流密度及其厚度、反应前驱体气体H2与CH4流速比、CVD沉积时间以及铜箔退火时间等工艺参数,实现在电沉积铜箔表面生长出缺陷程度可控的少层石墨烯薄膜。
Graphene films synthesized by chemical vapor deposition(CVD)technique exhibited superior characteristics,such as low defective structure and controllable layer number.Based on the copper plating process in copper sulfate acid,ultra-thin copper foils were prepared by the electrodeposition technique under different current densities,and used as the growing substrates for high-quality low-layer graphene films during CVD process.X-ray diffraction(XRD),scanning electronic microscope(SEM)and multiple-site Raman mapping spectra technique were performed to study the structure and morphology of electrodeposited copper foils and the synthesized graphene.Results showed that the electrodeposited copper foil structure had a strong trend of growing in preferential lattice surface orientation,which was determined by electrodepositing current density.Besides,the electrodeposited cooper foils had smoother surfaces and continuous sliding steps after high-temperature annealing treatment in H_(2) atmosphere,which was more beneficial for the growth of high-quality graphene compared with the commercial cold-rolled copper foils.Moreover,these results revealed that the few-layer graphene with controllable defective level could be synthesized by elaborately modifying the electrodepositing current density and thickness during copper foils preparation,flowing speed ratios between precursory CH4 and H2,deposition time and thermal-treating period for the copper foils during CVD process.
作者
朱广奇
齐艳玲
ZHU Guangqi;QI Yanling(School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China)
出处
《南京工业大学学报（自然科学版）》
CAS
北大核心
2021年第5期621-628,669,共9页
Journal of Nanjing Tech University(Natural Science Edition)
