摘要
本文以背散射成像技术在扫描电镜观察纳米多层膜形貌中的应用为背景,简要介绍了扫描电子显微镜背散射电子成像的工作原理,并从分析准确度、分辨率及取出角对背散射电子成像影响的3个角度研究了其在纳米多层膜表面形貌观察中的应用.结果表明:利用扫描电镜背散射电子成像技术可有效表征纳米多层膜样品微区成分变化,能够快速了解样品的组成和结构特征,其分析准确度、分辨率均在纳米量级.该方法可为纳米多层膜调制结构的表征及鉴别提供快速、简便、有效的分析手段.同时,对该技术的探讨将帮助物理学专业学生更好的理解背散射现象的物理机制,帮助材料专业的学生更好的应用该表征技术.
In order to extend applied realms of back-scattered-electron(BSE)imaging technique in the nanometer multilayer morphology observation,the basic principles and applications of the BSE images in nano-multilayer characterization are described from three aspects:analytical accuracy,maximum resolution and detection angle.BSE imaging is used to study the composition changes in the micro areas of nano-multilayer so as to understand the composition and structure characteristics of samples in a short time and to provide a handy and effective analysis method for the multi-layer structures of nano-multilayer.Meanwhile,the discussion of this technology will help physics majors better understand the physical mechanism of backscattering phenomenon,and help materials majors better apply this characterization technology.
作者
赵梦鲤
毛栋
董磊
董雷
ZHAO Meng-li;MAO Dong;DONG Lei;DONG Lei(College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China)
出处
《大学物理》
2020年第7期40-44,共5页
College Physics
基金
天津自然科学基金青年项目(18JCQNJC72000)
天津师范大学实验室改革研究基金(TJNUSYS-2017-26)资助。
关键词
背散射像
纳米多层膜
分辨率
分析准确度
取出角
backscattered electron image
nano-multilayer
analytical accuracy
maximum resolution
detection angle
