摘要
扫描电子显微镜是一种高精密仪器,结构复杂,成像过程中,影响图像质量的因素较多,对其中几个主要因素,例如加速电压、发射电流、束斑尺寸和工作距离等在成像过程中的作用以及如何加以控制进行了分析。
SEM is a kind of highly sophisticated device with complicated structure.In the process of image formation there are quite a lot of factors affecting the image quality,among which a few factors such as the accelerating voltage,emission current,spot size and working distance are analyzed and measures to control them discussed.
出处
《武钢技术》
CAS
2005年第3期30-32,共3页
Wisco Technology
