摘要
本文通过对钍钨灯丝电子管阴极溅散问题的分析及避免阴极溅散问题的探讨,总结影响电子管阴极溅散的几种因素,制定合理而科学的工艺规范,从而选用最佳的工艺方案,提高产品质量。
The affecting factors on cathode sputtering in thorium-tungsten filament electron tubes were studied.Some reasonable and scientific processing specifications were carried out and optimized technology was chosen to avoid cathode sputtering and to improve products quality.
出处
《真空电子技术》
2014年第6期66-68,共3页
Vacuum Electronics
关键词
阴极溅散
老炼
放气
真空度
Cathode sputtering
Aging
Outgassing
Vacuum degree