摘要
针对现有共焦显微镜中定焦速度慢和定焦精度差的问题,提出了基于单步驱动的激光共焦显微镜快速定焦方法。充分利用轴向扫描器件的响应时间通过单步驱动获取数据,大幅提高采集速度,提高系统信噪比;通过拟合区间优化和分开拟合的数据处理方法来快速、准确获取定焦目标位置,进而实现激光共焦显微镜轴向定焦效率的提升。理论分析与实验结果表明:与现有定焦方法相比,方法在粗定焦阶段使定焦速度提升5.64倍,在准确定焦阶段使定焦速度提升3.08倍,其有效提升了现有共焦显微镜的轴向定焦速度和精度。
Aiming at the problem of slow speed and poor precision of focusing in existing confocal microscopes, this paper proposes a fast focusing method based on single-step driving laser confocal microscope. The method firstly acquires data based on single-step driving of axial scanner. Then, by fitting the interval-optimized data processing method, the position of the focus identification can be quickly and accurately obtained, thereby improving the imaging speed and accuracy of the laser confocal microscope. Theoretical analysis and experimental results show that compared with the existing focus identification method, the method increases the focus identification speed by 5.64 times in the coarse focus identification stage and 3.08 times in the quasi-determined focus stage, which effectively improves the axial focus identification speed and speed of the confocal microscope.
作者
於维华
王允
邱丽荣
吴寒旭
赵维谦
YU Weihua;WANG Yun;QIU Lirong;WU Hanxu;ZHAO Weiqian(Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)
出处
《光学技术》
CAS
CSCD
北大核心
2019年第5期535-540,共6页
Optical Technique
基金
国家自然基金杰出青年基金(51825501)
国家重点研发计划课题(2017YFA0701203)
关键词
光学测量
共焦
快速定焦
单步驱动
optical measurement
confocal
fast focus identification
single step drive
