摘要
配合间隙是决定球型惯性器件精度和可靠性的关键参数之一,针对球型惯性器球面元件表面有缺口且未完全抛光导致曲率半径难以精确测量,进而难以准确控制球碗、球冠配合间隙瓶颈问题,提出了一种球面惯性元件配合间隙激光差动共焦高精度方法。该方法利用抗散射的激光差动共焦曲率半径测量方法分别对球碗、球冠的曲率半径进行测量,然后利用差动共焦曲率半径测量系统测得的球碗和球冠的半径差来控制球型惯性器球面的配合间隙。理论分析与实验验证表明:该方法测量球冠和球碗配合间隙的相对扩展不确定度优于20×10^-6,其为惯性器件球冠和球碗配合间隙的高精度测量与控制提供了一种全新的技术手段。
Matching clearance is one of the key parameters to determine the accuracy and reliability of spherical inertia element.It is difficult to accurately measure the radius of the spherical inertia element due to the clearance and rough surface,which further lead to hardly control the matching clearance of ball bowl and ball.A laser differential confocal(LDC)-based high-precision measurement method for spherical inertial element matching clearance is proposed in this work.Firstly,the anti-scattering laser differential confocal radius measurement method is used to measure the radius of the bowl and the spherical crown,respectively.Then,the differential confocal radius measurement systems are utilized to measure the radius difference between the bowl and the crown.Finally,the matching clearance of the spherical inertia sphere is controlled by using the radius difference.Theoretical analysis and experimental results show that the method can measure the relative expansion uncertainty of matching clearance of the spherical crown and the ball bowl with the precision better than 20×10^-6.It provides a new technology for the high-precision measurement and control of the spherical inertia element matching clearance.
作者
许鑫
姚竹贤
王允
杨帅
赵维谦
Xu Xin;Yao Zhuxian;Wang Yun;Yang Shuai;Zhao Weiqian(Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Beijing Institute of Aerospace Control Devices,Beijing 100854,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2019年第4期1-8,共8页
Chinese Journal of Scientific Instrument
基金
青年人才托举工程(YESS20160007)
国家自然科学基金(51825501)项目资助
关键词
光学测量
球型惯性元件
抗散射
配合间隙
optical measurement
spherical inertial element
anti-scattering
matching clearance
