摘要
为了提高晶圆制造中组合设备的生产效率,在考虑晶圆驻留时间约束条件下,研究没有共享加工模块的多品种晶圆混合加工的单臂组合设备调度问题.首先,采用面向资源的Petri网模型描述多种晶圆产品的混合加工过程,引入控制变迁避免模型的死锁,采用赋时库所和赋时变迁模拟系统资源的活动时间.其次,通过虚拟加工的方法平衡工序的负载,基于系统Petri网模型和拉式调度策略,推导出单臂组合设备在多品种晶圆混合加工情形下的可调度性判定条件,并以解析形式描述.最后,提出了系统稳态调度求解算法并以实例验证了算法的有效性和可行性.
To improve the production efficiency of cluster tools, wafer residency time constraints considered and withoutPM sharing, scheduling of single-armed cluster tools with mixed-processing of multi-variety wafers are addressed. Firstly,a resource-oriented Petri net (ROPN) model is developed to describe the wafer fabrication process. Controlled transitionsare introduced into models to avoid deadlock, and time is associated with places and transitions to model activity times.Secondly, workloads among the processing steps are balanced via virtual process modules. Analytic expressions for testingschedulability are derived based on the Petri net and backward scheduling strategy. Finally, a scheduling algorithm forthe steady state is presented. Meanwhile, illustrative examples are given to verify the validity of the scheduling algorithmproposed.
作者
潘春荣
王际鹏
PAN Chun-rong;WANG Ji-peng(School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou Jiangxi 341000, China)
出处
《控制理论与应用》
EI
CAS
CSCD
北大核心
2016年第9期1171-1181,共11页
Control Theory & Applications
基金
国家自然科学基金项目(71361014
51665018)
江西省教育厅项目(GJJ150673)资助~~
